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1. (WO2017154791) LASER LIGHT RADIATION DEVICE AND LASER LIGHT RADIATION METHOD

Pub. No.:    WO/2017/154791    International Application No.:    PCT/JP2017/008578
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Sat Mar 04 00:59:59 CET 2017
IPC: B23K 26/00
B23K 26/035
B23K 26/064
G02F 1/13
Applicants: HAMAMATSU PHOTONICS K.K.
浜松ホトニクス株式会社
Inventors: IGASAKI Yasunori
伊ケ崎 泰則
NAKAGAWA Aiko
中川 愛湖
Title: LASER LIGHT RADIATION DEVICE AND LASER LIGHT RADIATION METHOD
Abstract:
A laser light radiation device, provided with: a laser light source for generating laser light; a spatial light modulator having a display unit for displaying a phase pattern; an objective lens for condensing the laser light emitted by the spatial light modulator onto an object; an image transfer optical system for transferring an image of the laser light on the display unit onto an entrance pupil surface of the objective lens; a reflection light detector for detecting the reflection light of the laser light incident on the object and reflected by an opposite surface on the opposite side from the laser light incident surface; and a control unit for controlling the phase pattern to be displayed on the display unit. When the reflection light is detected by the reflection light detector, the control unit causes the display unit to display a reflection light aberration-correcting pattern, which is a phase pattern for correcting an aberration that occurs when the laser light is transmitted through an object having twice the thickness of a predetermined thickness.