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1. (WO2017154707) DETECTION DEVICE, DETECTION SYSTEM, DETECTION METHOD, AND DETECTION PROGRAM

Pub. No.:    WO/2017/154707    International Application No.:    PCT/JP2017/008166
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Thu Mar 02 00:59:59 CET 2017
IPC: G01B 11/00
G01B 11/24
G06T 1/00
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: NAKAGAWA, Yoshihiro
中川 源洋
SUGIMURA, Takeaki
杉村 武昭
YAMARIKU, Yoshiyuki
山陸 芳之
Title: DETECTION DEVICE, DETECTION SYSTEM, DETECTION METHOD, AND DETECTION PROGRAM
Abstract:
[Problem] To obtain the positions of a plurality of detection devices relative to one another. [Solution] A detection device is provided with: a detection unit that detects an object from a first viewpoint; an information calculation unit that calculates first model information including shape information for the object in the first viewpoint using the detection result of the detection unit; a light source calculation unit that calculates light source information regarding a light source using a first captured image of a space containing the object and a light source for illuminating the object with illuminating light; and a position calculation unit that calculates the positional relationship of the first viewpoint and the object using the light source information as information used to integrate first model information and second model information, said second model information including form information obtained by detecting the object from a second viewpoint which is different from the first viewpoint.