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1. (WO2017154659) MASK MANUFACTURING DEVICE

Pub. No.:    WO/2017/154659    International Application No.:    PCT/JP2017/007689
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Mar 01 00:59:59 CET 2017
IPC: H01L 21/68
G03F 7/20
Applicants: V TECHNOLOGY CO., LTD.
株式会社ブイ・テクノロジー
Inventors: YONEZAWA Makoto
米澤 良
Title: MASK MANUFACTURING DEVICE
Abstract:
The present invention enables a mask to be moved in a horizontal direction while preventing warping of the mask being held in the horizontal direction and without changing the height of the mask. A plate portion (23) supporting a mask holder portion is mounted on a plurality of first rails (21) which are fixed on an upper face of a surface table along a first direction (X-direction) and which have substantially the same height. Air is ejected toward the first rails so as to form an air layer between the plate portion and the first rails. The direction of movement of the plate portion is regulated by first guide portions (22, 24) so that the plate portion does not move in directions other than the first direction. In addition, the mask holder portion is mounted on a plurality of second rails (31) which are fixed on an upper face of the plate portion along a second direction (Y-direction) and which have substantially the same height. Air is ejected toward the second rails so as to form an air layer between the mask holder portion and the second rails. The direction of movement of the mask holder portion is regulated by second guide portions (32, 33) so that the mask holder portion does not move in directions other than the second direction.