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|1. (WO2017154634) LIGHT-PROCESSING DEVICE, AND METHOD FOR ADJUSTING INTERVAL BETWEEN SURFACE OF OBJECT TO BE PROCESSED AND WINDOW MEMBER|
|Applicants:||USHIO DENKI KABUSHIKI KAISHA
|Title:||LIGHT-PROCESSING DEVICE, AND METHOD FOR ADJUSTING INTERVAL BETWEEN SURFACE OF OBJECT TO BE PROCESSED AND WINDOW MEMBER|
Disclosed are a light-processing device 100 for equalizing processing by equalizing gaps, and a method for adjusting the interval between the surface of an object to be processed and a window member 12. One aspect of the light-processing device is provided with: a light source unit for emitting light; a processing unit 20 in which the surface of the object to be processed is exposed to light emitted from the light source unit in a processing gas atmosphere; a window member that separates the light source unit and the processing unit, the window member transmitting light emitted from the light source unit; a gas-charging/discharging unit for channeling the processing gas along the surface between the surface of the object to be processed and the window member; and a differential-pressure-regulating unit for regulating the pressure difference of both sides separated by the window member while the processing gas is flowing.