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1. (WO2017154634) LIGHT-PROCESSING DEVICE, AND METHOD FOR ADJUSTING INTERVAL BETWEEN SURFACE OF OBJECT TO BE PROCESSED AND WINDOW MEMBER

Pub. No.:    WO/2017/154634    International Application No.:    PCT/JP2017/007442
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Tue Feb 28 00:59:59 CET 2017
IPC: H01L 21/027
F21S 2/00
G03F 7/20
H01L 21/304
H01L 21/3065
Applicants: USHIO DENKI KABUSHIKI KAISHA
ウシオ電機株式会社
Inventors: KIKUIRI, Hajime
菊入 元
NAMAI, Masahito
生井 昌仁
NOMOTO, Kentaro
野本 憲太郎
Title: LIGHT-PROCESSING DEVICE, AND METHOD FOR ADJUSTING INTERVAL BETWEEN SURFACE OF OBJECT TO BE PROCESSED AND WINDOW MEMBER
Abstract:
Disclosed are a light-processing device 100 for equalizing processing by equalizing gaps, and a method for adjusting the interval between the surface of an object to be processed and a window member 12. One aspect of the light-processing device is provided with: a light source unit for emitting light; a processing unit 20 in which the surface of the object to be processed is exposed to light emitted from the light source unit in a processing gas atmosphere; a window member that separates the light source unit and the processing unit, the window member transmitting light emitted from the light source unit; a gas-charging/discharging unit for channeling the processing gas along the surface between the surface of the object to be processed and the window member; and a differential-pressure-regulating unit for regulating the pressure difference of both sides separated by the window member while the processing gas is flowing.