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1. (WO2017154594) ARTICLE HAVING SURFACE TREATMENT LAYER, METHOD FOR MANUFACTURING SAME, AND DEVICE FOR MANUFACTURING SAME

Pub. No.:    WO/2017/154594    International Application No.:    PCT/JP2017/006841
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Fri Feb 24 00:59:59 CET 2017
IPC: C23C 16/42
B32B 9/00
C09D 1/00
C09D 5/00
C09D 183/05
C09K 3/18
C23C 16/50
C23C 16/56
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
DAIKIN INDUSTRIES, LTD.
ダイキン工業株式会社
Inventors: FUSE Takashi
布瀬 暁志
MORISHIMA Masato
森嶋 雅人
FUJIMOTO Madoka
藤本 円華
NISHIDE Daisuke
西出 大亮
MITSUHASHI Hisashi
三橋 尚志
OZAWA Kaori
小澤 香織
NOSE Masatoshi
能勢 雅聡
ITAMI Yasuo
伊丹 康雄
Title: ARTICLE HAVING SURFACE TREATMENT LAYER, METHOD FOR MANUFACTURING SAME, AND DEVICE FOR MANUFACTURING SAME
Abstract:
The method according to the present invention for manufacturing an article having a substrate, a silicon oxide film formed as an intermediate layer on the substrate, and a surface treatment layer formed on the silicon oxide film includes the steps of forming a silicon oxide film using a silicon starting material including Si-H bonds or Si-H bonds and Si-CHx bonds by a CVD method in which a film formation condition is set so that the Si-H bonds or the Si-H bonds and Si-CHx bonds in the silicon starting material remain in the silicon oxide film, and forming a surface treatment layer on the formed silicon oxide film using a surface treatment agent including a fluorine-containing silane compound. Through the present invention, an article having a surface treatment layer can be obtained which has superior abrasion resistance.