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|1. (WO2017154594) ARTICLE HAVING SURFACE TREATMENT LAYER, METHOD FOR MANUFACTURING SAME, AND DEVICE FOR MANUFACTURING SAME|
|Applicants:||TOKYO ELECTRON LIMITED
DAIKIN INDUSTRIES, LTD.
|Title:||ARTICLE HAVING SURFACE TREATMENT LAYER, METHOD FOR MANUFACTURING SAME, AND DEVICE FOR MANUFACTURING SAME|
The method according to the present invention for manufacturing an article having a substrate, a silicon oxide film formed as an intermediate layer on the substrate, and a surface treatment layer formed on the silicon oxide film includes the steps of forming a silicon oxide film using a silicon starting material including Si-H bonds or Si-H bonds and Si-CHx bonds by a CVD method in which a film formation condition is set so that the Si-H bonds or the Si-H bonds and Si-CHx bonds in the silicon starting material remain in the silicon oxide film, and forming a surface treatment layer on the formed silicon oxide film using a surface treatment agent including a fluorine-containing silane compound. Through the present invention, an article having a surface treatment layer can be obtained which has superior abrasion resistance.