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1. (WO2017154507) METAL FILLING DEVICE AND METAL FILLING METHOD

Pub. No.:    WO/2017/154507    International Application No.:    PCT/JP2017/005737
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Fri Feb 17 00:59:59 CET 2017
IPC: B22D 19/00
H01L 21/283
H01L 21/3205
H01L 21/768
H01L 23/522
Applicants: SUMITOMO PRECISION PRODUCTS CO., LTD.
住友精密工業株式会社
Inventors: YAMAGUCHI, Yukitaka
山口 征隆
Title: METAL FILLING DEVICE AND METAL FILLING METHOD
Abstract:
A metal filling device of the present invention is provided with a placing unit (10), a molten metal supply unit (20), a seal unit (22), an airtight chamber (30) housing the placing unit, the molten metal supply unit, and the seal unit therein, and a gas supply unit (40) that supplies a gas to the inside of the chamber. A processing chamber (4) is formed with a facing surface (21), the seal unit, and the surface of the subject (1) to be processed, and a molten metal (3) is supplied to the inside of the processing chamber, and fine spaces (2) are filled with the molten metal.