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|1. (WO2017154435) SUBSTRATE SUPPORTING DEVICE|
|Applicants:||NGK SPARK PLUG CO., LTD.
|Title:||SUBSTRATE SUPPORTING DEVICE|
Provided is a substrate supporting device having a power supply structure capable of excellently supplying power to each of a large number of electrodes. A ceramic heater 100 is provided with: a base material 10 having, as an upper surface, a supporting surface for supporting a substrate; electrodes 20 embedded in the base material 10; a base material supporting member 30, which is attached to the lower surface of the base material 10, and which is formed of a heat insulating material; and power supply rods 40, each of which is formed in a peripheral wall 34 of the base material supporting member 30, passes through one through hole 35 penetrating in the vertical direction, and is electrically connected to each of the electrodes 20.