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1. (WO2017154435) SUBSTRATE SUPPORTING DEVICE

Pub. No.:    WO/2017/154435    International Application No.:    PCT/JP2017/004138
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Tue Feb 07 00:59:59 CET 2017
IPC: H01L 21/683
H01L 21/02
H05B 3/02
H05B 3/20
Applicants: NGK SPARK PLUG CO., LTD.
日本特殊陶業株式会社
Inventors: TOKUSHO Noriaki
徳正 典昭
SASAKI Shunichi
佐々木 俊一
ISHINO Tomohiro
石野 智浩
AOYAMA Hisanori
青山 久範
HINO Makoto
檜野 誠
FUKAZAWA Kenichi
深澤 健一
TSUCHIDA Atsushi
土田 淳
UMEKI Toshiya
梅木 俊哉
Title: SUBSTRATE SUPPORTING DEVICE
Abstract:
Provided is a substrate supporting device having a power supply structure capable of excellently supplying power to each of a large number of electrodes. A ceramic heater 100 is provided with: a base material 10 having, as an upper surface, a supporting surface for supporting a substrate; electrodes 20 embedded in the base material 10; a base material supporting member 30, which is attached to the lower surface of the base material 10, and which is formed of a heat insulating material; and power supply rods 40, each of which is formed in a peripheral wall 34 of the base material supporting member 30, passes through one through hole 35 penetrating in the vertical direction, and is electrically connected to each of the electrodes 20.