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1. (WO2017154412) CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR

Pub. No.:    WO/2017/154412    International Application No.:    PCT/JP2017/003299
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Feb 01 00:59:59 CET 2017
IPC: H04R 19/04
B81B 3/00
H01L 29/84
Applicants: OMRON CORPORATION
オムロン株式会社
Inventors: KASAI, Takashi
笠井 隆
NAKAGAWA, Yusuke
中河 佑将
Title: CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR
Abstract:
Provided is a technology with which damage to a vibrating electrode film can be prevented by suppressing excessive deformation of the vibrating electrode film regardless of the direction in which the vibrating electrode film undergoes deformation when an acoustic sensor is subjected to excessive pressure. The invention is provided with a backplate 37, which is provided so as to face an opening of a substrate, and a vibrating electrode film 35, which is provided so as to face the backplate with a gap therebetween, and is further provided with a pressure release hole 35b, which is a through-hole that is provided in the vibrating electrode film 35, a protruding portion 37b, which is provided integrally to the backplate 37 using the same member as the backplate 37 and intrudes into the pressure release hole 35b in a state before deformation of the vibrating electrode film 35, and a pressure release flow path, which is an air flow path formed by a gap between the pressure release hole 35b and the protruding portion 37b, wherein the protruding portion 37b has a protruding portion hole 37c that connects the tip side of the protruding portion 37b and the opposite side of the backplate 37 from the protruding portion 37b.