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1. (WO2017154398) CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR

Pub. No.:    WO/2017/154398    International Application No.:    PCT/JP2017/002970
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Sat Jan 28 00:59:59 CET 2017
IPC: H04R 19/04
Applicants: OMRON CORPORATION
オムロン株式会社
Inventors: KASAI, Takashi
笠井 隆
UCHIDA, Yuuki
内田 雄喜
Title: CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR
Abstract:
The present invention provides a technology with which frequency properties at the time of sound detection can be favorably maintained and damage to a vibrating electrode film can be prevented by suppressing excessive deformation of the vibrating electrode film when subjected to excessive pressure. Provided is an acoustic sensor in which an acoustic vibration is detected by being converted to a change in the capacitance between a fixed electrode film of a backplate 17 and the vibrating electrode film 15, wherein when the vibrating electrode film 15 is subjected to excessive pressure and undergoes deformation, the pressure applied to the vibrating electrode film 15 is released by increasing, by means of relative movement between the vibrating electrode film 15 and a protruding portion 17b provided integrally to the backplate 17, the flow path area of an air flow path formed by a gap between the protruding portion 17b and the vibrating electrode film 15.