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1. (WO2017154319) DEFECT INSPECTION DEVICE

Pub. No.:    WO/2017/154319    International Application No.:    PCT/JP2017/000016
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Thu Jan 05 00:59:59 CET 2017
IPC: G01N 21/956
H01L 21/66
Applicants: TORAY ENGINEERING CO., LTD.
東レエンジニアリング株式会社
Inventors: YAMAMOTO, Hisashi
山本 比佐史
Title: DEFECT INSPECTION DEVICE
Abstract:
Provided is a defect inspection device capable of suppressing the overlooking of defects and the erroneous detection of defects. Specifically, this defect inspection device 100 is provided with a control unit 50 for detecting the edge 74 outside a peripheral area 72 of an element chip 70 and an effective area 71 of the element chip on the basis of an image of the element chip 70 imaged by an imaging unit 40, determining an inspection area 75 for defect inspection of the element chip 70 on the basis of the detected edge 74 outside the peripheral area 72 and the effective area 71, and detecting a defect in the element chip 70 by comparing an image corresponding to the inspection area 75 of the element chip 70 with an image of a non-defective element chip 70 that has been prepared beforehand.