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1. (WO2017154234) DEPOSITION MASK, DEPOSITION DEVICE, DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY DEVICE

Pub. No.:    WO/2017/154234    International Application No.:    PCT/JP2016/071622
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Sat Jul 23 01:59:59 CEST 2016
IPC: C23C 14/04
C23C 14/50
H01L 51/50
H05B 33/10
Applicants: HON HAI PRECISION INDUSTRY CO., LTD.
鴻海精密工業股▲ふん▼有限公司
Inventors: NISHIDA, Koshi
西田 光志
KISHIMOTO, Katsuhiko
岸本 克彦
Title: DEPOSITION MASK, DEPOSITION DEVICE, DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY DEVICE
Abstract:
Provided are: a deposition method whereby a deposition mask can be uniformly and reliably separated in a short time after a deposition material is deposited; a deposition mask; and a deposition device. The present invention includes: a step (S1) for forming a deposition mask (1) having, as at least a part thereof, a metal layer (metal supporting layer) formed of a ferromagnetic material; a step (S2) for magnetizing the metal layer by applying an electromagnetic field to the metal layer of the deposition mask (1); a step (S3) for aligning a substrate (2) to be subjected to deposition, and the deposition mask (1) with each other, then, attracting the deposition mask (1) to an electromagnet (3) by having the substrate (2) therebetween; a step (S4) for disposing a deposition source (5) on the side facing the deposition mask (1), vaporizing a deposition material from the deposition source (5), and depositing the deposition material on the substrate (2); and a step (S5) for separating the electromagnet (3) and the substrate (2) from the deposition mask (1) by generating, in the electromagnet (3), a magnetic field that repels the deposition mask (1).