Search International and National Patent Collections

1. (WO2017154111) EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

Pub. No.:    WO/2017/154111    International Application No.:    PCT/JP2016/057196
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Mar 09 00:59:59 CET 2016
IPC: H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: NISHIMURA Yuichi
西村 祐一
YABU Takayuki
薮 隆之
Title: EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Abstract:
Disclosed is an extreme ultraviolet light generation device that moves, on the basis of a command given from an external device, the generation position of extreme ultraviolet light. The extreme ultraviolet light generation device is provided with: a chamber, in which extreme ultraviolet light is generated from a target by irradiating the target with laser light, said target having been supplied to the inside; a target supplying apparatus that outputs and supplies the target to the inside of the chamber; a light collecting mirror that collects the laser light to the target supplied to the inside of the chamber; a stage that regulates the position of the target supplying apparatus; a manipulator that regulates the position of the light collecting mirror; and a control unit configured such that laser irradiation timing with respect to the stage and/or laser irradiation timing with respect to the manipulator and/or laser irradiation timing with respect to the target can be controlled by means of a feed forward system at the time of moving the generation position while generating the extreme ultraviolet light.