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1. (WO2017153747) BARRIER COATED SUBSTRATES

Pub. No.:    WO/2017/153747    International Application No.:    PCT/GB2017/050617
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Thu Mar 09 00:59:59 CET 2017
IPC: C08J 7/04
B05D 1/00
C23C 16/30
C23C 16/40
C23C 16/455
C23C 16/54
H01L 21/02
H01L 51/52
Applicants: FLEXIBLE BARRIER FILMS LIMITED
Inventors: BURNETT, Ian
WALKER, Chris
Title: BARRIER COATED SUBSTRATES
Abstract:
A method for forming a composite barrier layer on a substrate to protect against moisture and gas permeation, the method comprising forming onsaid substrate a composite barrier layer comprising: (i) a polymeric sublayer formed by atmospheric pressure plasma enhanced chemical vapour deposition; and (ii) an inorganic sublayer formed by atmospheric pressure spatial atomic layer deposition. Also described area substrate having such a composite barrier layer formed thereon together with an OLED opto-electronic device comprising such a substrate.