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|1. (WO2017153747) BARRIER COATED SUBSTRATES|
|Applicants:||FLEXIBLE BARRIER FILMS LIMITED
|Title:||BARRIER COATED SUBSTRATES|
A method for forming a composite barrier layer on a substrate to protect against moisture and gas permeation, the method comprising forming onsaid substrate a composite barrier layer comprising: (i) a polymeric sublayer formed by atmospheric pressure plasma enhanced chemical vapour deposition; and (ii) an inorganic sublayer formed by atmospheric pressure spatial atomic layer deposition. Also described area substrate having such a composite barrier layer formed thereon together with an OLED opto-electronic device comprising such a substrate.