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1. (WO2017153388) A MANUFACTURING METHOD FOR A NANOSTRUCTURED DEVICE USING A SHADOW MASK

Pub. No.:    WO/2017/153388    International Application No.:    PCT/EP2017/055291
Publication Date: Fri Sep 15 01:59:59 CEST 2017 International Filing Date: Wed Mar 08 00:59:59 CET 2017
IPC: H01L 39/22
B82Y 40/00
C23C 14/14
C30B 29/60
H01L 39/24
G06N 99/00
Applicants: UNIVERSITY OF COPENHAGEN
Inventors: KROGSTRUP, Peter
MARCUS, Charles
Title: A MANUFACTURING METHOD FOR A NANOSTRUCTURED DEVICE USING A SHADOW MASK
Abstract:
The present disclosure relates to a device and method for forming efficient quantum devices, in particular quantum devices that have not been contaminated in ex-situ processes. In particular the presently disclosed method can be applied for manufacturing of a Josephson junction which is an element in a tuneable superconducting qubit. One embodiment relates to a method for in-situ production of a barrier/gap in the surface layer(s) of an elongated nanostructure, the method comprising the steps of providing at least one elongated device nanostructure on a substrate in a vacuum chamber having at least one deposition source, providing at least one elongated shadow nanostructure in said vacuum chamber, and depositing at least a first facet layer on at least a part of the device nanostructure(s) and the shadow nanostructure(s) by means of said deposition source, wherein the deposition source, the device nanostructure and the shadow nanostructure during deposition are arranged such that the shadow nanostructure covers and forms a shadow mask on at least a part of the device nanostructure thereby forming a gap in the first facet layer deposited on the device nanostructure.