Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2017153281) MEMS SENSOR APPARATUS AND CORRESPONDING PRODUCTION METHOD
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/153281 International Application No.: PCT/EP2017/055037
Publication Date: 14.09.2017 International Filing Date: 03.03.2017
IPC:
H04R 19/00 (2006.01) ,H04R 7/20 (2006.01) ,H04R 7/26 (2006.01) ,H04R 7/06 (2006.01) ,H04R 19/04 (2006.01) ,H04R 3/00 (2006.01)
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
7
Diaphragms for electromechanical transducers; Cones
16
Mounting or tensioning of diaphragms or cones
18
at the periphery
20
Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
7
Diaphragms for electromechanical transducers; Cones
26
Damping by means acting directly on free portion of diaphragm or cone
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
7
Diaphragms for electromechanical transducers; Cones
02
characterised by the construction
04
Plane diaphragms
06
comprising a plurality of sections or layers
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
04
Microphones
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
3
Circuits for transducers
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
BUCK, Thomas; DE
EHRENPFORDT, Ricardo; DE
NORTHEMANN, Thomas; DE
SCHEBEN, Rolf; DE
Priority Data:
10 2016 203 914.810.03.2016DE
Title (EN) MEMS SENSOR APPARATUS AND CORRESPONDING PRODUCTION METHOD
(FR) DISPOSITIF CAPTEUR MEMS ET PROCÉDÉ DE FABRICATION ASSOCIÉ
(DE) MEMS-SENSOR-VORRICHTUNG UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN
Abstract:
(EN) The invention relates to an MEMS sensor apparatus (100; 400; 700) having a substrate (101); a membrane device (105; 401; 701) that is clamped to the substrate (101) and that is movable, at least one counter-electrode (108; 704a, 704b) arranged on the substrate (101); at least one stop device (104; 704a, 704b) arranged on the substrate (101); a control apparatus (109) that is designed to apply a first voltage between the at least one counter-electrode (108; 704a, 704b) and at least one portion of the membrane device (105; 401; 701) in a first oscillation mode and to apply a second voltage in a second oscillation mode, so that in the first oscillation mode the stop device (104; 704a, 704b) is spaced apart from the membrane device (105; 401; 701); so that in the second oscillation mode the stop device (104; 704a, 704b) touches the membrane device (105; 401; 701); and wherein an elasticity of the membrane device (105; 401; 701) in the first oscillation mode is higher than the elasticity of the membrane device (105; 401; 701) in the second oscillation mode.
(FR) L'invention concerne un dispositif capteur MEMS (100; 400; 700) comportant un substrat (101), un dispositif formant membrane (105; 401; 701) qui peut se déplacer et est tendu sur le substrat (1), au moins une contre-électrode (108; 704a, 704b) montée sur le substrat (101), au moins un dispositif de butée (104; 704a, 704b) monté sur le substrat (101), un dispositif de commande (109), conçu de manière à appliquer, dans un premier mode de vibration, une première tension entre ladite au moins une contre-électrode (108; 704a, 704b) et au moins une partie du dispositif formant membrane (105; 401; 701) et, dans un second mode de vibration, à appliquer une seconde tension, de sorte que dans le premier mode de vibration, le dispositif de butée (104; 704a, 704b) se situe à distance du dispositif formant membrane (105; 401; 701) afin que, dans le second mode de vibration, le dispositif de butée (104; 704a, 704b) touche le dispositif formant membrane (105; 401; 701), et l'élasticité du dispositif formant membrane (105; 401; 701) étant plus importante dans le premier mode de vibration que l'élasticité dudit dispositif formant membrane (105; 401; 701) dans le second mode de vibration.
(DE) Die Erfindung betrifft eine MEMS-Sensor- Vorrichtung (100; 400; 700) mit einem Substrat (101); einer an dem Substrat (101) eingespannten Membraneinrichtung (105; 401; 701), welche bewegbar ist, mindestens einer an dem Substrat (101) angeordneten Gegenelektrode (108; 704a, 704b); mindestens einer an dem Substrat (101) angeordneten Anschlagseinrichtung (104; 704a, 704b); einer Steuervorrichtung (109), welche ausgebildet ist, zwischen der mindestens einen Gegenelektrode (108; 704a, 704b) und zumindest einem Teil der Membraneinrichtung (105; 401; 701) in einem ersten Schwingungsmodus eine erste Spannung anzulegen und in einem zweiten Schwingungsmodus eine zweite Spannung anzulegen, sodass in dem ersten Schwingungsmodus die Anschlagseinrichtung (104; 704a, 704b) von der Membraneinrichtung (105; 401; 701) beabstandet ist; sodass in dem zweiten Schwingungsmodus die Anschlagseinrichtung (104; 704a, 704b) die Membraneinrichtung (105; 401; 701) berührt; und wobei eine Elastizität der Membraneinrichtung (105; 401; 701) in dem ersten Schwingungsmodus höher ist als die Elastizität der Membraneinrichtung (105; 401; 701) in dem zweiten Schwingungsmodus.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)