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1. (WO2017151597) FLEXIBLE PMUT ARRAY

Pub. No.:    WO/2017/151597    International Application No.:    PCT/US2017/019916
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Mar 01 00:59:59 CET 2017
IPC: H01L 41/09
B06B 1/06
H01L 41/313
H01L 41/331
Applicants: QUALCOMM INCORPORATED
Inventors: KIDWELL JR., Donald William
SHENOY, Ravindra
LASITER, Jon
Title: FLEXIBLE PMUT ARRAY
Abstract:
Embodiments of a flexible PMUT array and methods for manufacturing the same are disclosed. In one embodiment, a piezoelectric micromechanical ultrasonic transducer (PMUTs) array comprises a plurality of PMUTs, where each PMUT in the flexible array of PMUTs includes: a first polymer layer configured to support the PMUT, a mechanical layer configured to provide planarization to the PMUT, a first electrode, a second electrode, a piezoelectric layer configured to separate the first electrode and the second electrode, patterns on the first electrode, the piezoelectric material, and the second electrode configured to route electrical signals, and a cavity configured to adjust a frequency response of the PMUT.