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1. (WO2017151213) PROBE SYSTEM AND METHODS INCLUDING ACTIVE ENVIRONMENTAL CONTROL

Pub. No.:    WO/2017/151213    International Application No.:    PCT/US2016/068270
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Fri Dec 23 00:59:59 CET 2016
IPC: G01N 25/66
G01R 31/00
G01R 31/28
Applicants: CASCADE MICROTECH, INC.
Inventors: TEICH, Michael
KIESEWETTER, Jorg
HACKIUS, UlF
ZILL, Frank
KREHER, Mirko
Title: PROBE SYSTEM AND METHODS INCLUDING ACTIVE ENVIRONMENTAL CONTROL
Abstract:
Probe systems and methods including active environmental control are disclosed herein. The methods include placing a substrate, which includes a device under test (DUT), on a support surface of a chuck. The support surface extends within a measurement environment that is at least partially surrounded by a measurement chamber. The methods further include determining a variable associated with a moisture content of the measurement environment and receiving a temperature associated with the measurement environment. The methods also include supplying a purge gas stream to the measurement chamber at a purge gas flow rate and selectively varying the purge gas flow rate such that a dew point temperature of the measurement environment is within a target dew point temperature range. The methods further include providing a test signal to the DUT and receiving a resultant signal from the DUT. The systems include probe systems that perform the methods.