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1. (WO2017151055) OPTICAL STRUCTURE AND METHOD OF FORMING THE SAME

Pub. No.:    WO/2017/151055    International Application No.:    PCT/SG2017/050060
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Feb 11 00:59:59 CET 2017
IPC: G02B 6/00
H01L 31/0232
H01L 21/02
Applicants: NANYANG TECHNOLOGICAL UNIVERSITY
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventors: TAN, Chuan Seng
LI, Wei
ANANTHA, P
LEE, Kwang Hong
BAO, Shuyu
ZHANG, Lin
Title: OPTICAL STRUCTURE AND METHOD OF FORMING THE SAME
Abstract:
Various embodiments may provide an optical structure. The optical structure may include a substrate. The optical structure may also include a core layer configured to carry optical light. The core layer may include germanium. The optical structure may further include an intermediate layer separating the substrate and the core layer so that the substrate is isolated from the core layer. The intermediate layer may include one or more materials selected from a group consisting of III-V materials, dielectric materials, and chalcogenide materials. A width of the core layer may be smaller than a width of the intermediate layer. A refractive index of the core layer may be more than 4. A refractive index of the intermediate layer may be smaller than 3.6.