Search International and National Patent Collections

1. (WO2017150977) SCANNING ELECTRON MICROSCOPE

Pub. No.:    WO/2017/150977    International Application No.:    PCT/NL2017/050128
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Mar 04 00:59:59 CET 2017
IPC: H01J 37/18
H01J 37/20
H01J 37/28
Applicants: PHENOM-WORLD HOLDING B.V.
Inventors: VAN DER MAST, Karel Diederick
HAMMEN, Adrianus Franciscus Johannes
THEUWS, Wilhelmus Henrica Cornelis
STOKS, Sander Richard Marie
Title: SCANNING ELECTRON MICROSCOPE
Abstract:
A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.