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1. (WO2017150584) SENSOR ELEMENT AND SENSOR DEVICE

Pub. No.:    WO/2017/150584    International Application No.:    PCT/JP2017/008015
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Mar 01 00:59:59 CET 2017
IPC: G01N 29/02
Applicants: KYOCERA CORPORATION
京セラ株式会社
Inventors: KOBAYASHI, Kyohei
小林 京平
Title: SENSOR ELEMENT AND SENSOR DEVICE
Abstract:
The present invention pertains to a sensor element and a sensor device having high measurement accuracy by improving temperature properties. A sensor element 3 according to an embodiment of the present invention is provided with an element substrate 10, a detection unit 30 located on an upper surface of the element substrate 10, and a protective film 28 covering at least a first IDT electrode 11 and a second IDT electrode 12. The element substrate 10 comprises a crystal and has Euler angles of (φ = 0°, 97.2° ≤ θ ≤ 128.9°, and 85° ≤ ψ ≤ 95°). The thickness tc (a thickness normalized by the wavelength λ (μm) of a surface acoustic wave) of a portion of the protective film 28 covering the first IDT electrode 11 and the second IDT electrode 12 is 0 < tc ≤ 0.17 λ.