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1. (WO2017150572) CERAMIC LAMINATE
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Pub. No.: WO/2017/150572 International Application No.: PCT/JP2017/007981
Publication Date: 08.09.2017 International Filing Date: 28.02.2017
IPC:
C23C 24/04 (2006.01) ,B32B 15/04 (2006.01) ,H01B 1/02 (2006.01) ,H01B 3/12 (2006.01) ,H01B 5/14 (2006.01) ,H01L 23/36 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
24
Coating starting from inorganic powder
02
by application of pressure only
04
Impact or kinetic deposition of particles
B PERFORMING OPERATIONS; TRANSPORTING
32
LAYERED PRODUCTS
B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
15
Layered products essentially comprising metal
04
comprising metal as the main or only constituent of a layer, next to another layer of a specific substance
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
1
Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
02
mainly consisting of metals or alloys
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
3
Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
02
mainly consisting of inorganic substances
12
ceramics
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
5
Non-insulated conductors or conductive bodies characterised by their form
14
comprising conductive layers or films on insulating-supports
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23
Details of semiconductor or other solid state devices
34
Arrangements for cooling, heating, ventilating or temperature compensation
36
Selection of materials, or shaping, to facilitate cooling or heating, e.g. heat sinks
Applicants:
新日鐵住金株式会社 NIPPON STEEL & SUMITOMO METAL CORPORATION [JP/JP]; 東京都千代田区丸の内二丁目6番1号 6-1, Marunouchi 2-chome, Chiyoda-ku, Tokyo 1008071, JP
Inventors:
▲徳▼橋 恵祐 TOKUHASHI, Keisuke; JP
木村 圭一 KIMURA, Keiichi; JP
宇野 智裕 UNO, Tomohiro; JP
佐藤 裕 SATO, Yutaka; JP
Agent:
青木 篤 AOKI, Atsushi; JP
石田 敬 ISHIDA, Takashi; JP
古賀 哲次 KOGA, Tetsuji; JP
福地 律生 FUKUCHI, Norio; JP
出野 知 DENO, Satoru; JP
小林 良博 KOBAYASHI, Yoshihiro; JP
堂垣 泰雄 DOGAKI, Yasuo; JP
Priority Data:
2016-03855501.03.2016JP
Title (EN) CERAMIC LAMINATE
(FR) STRATIFIÉ DE CÉRAMIQUE
(JA) セラミックス積層体
Abstract:
(EN) Provided is a ceramic laminate which has excellent mechanical characteristics, heat dissipation properties, insulation properties, heat resistance and reaction resistance, in particular, an insulating heat dissipation element which has excellent heat cycle reliability and high insulation withstand voltage. A ceramic laminate 1 according to the present invention comprises a ceramic film 3 that is formed on a metal layer 2; and the ceramic film 3 has a minimum film thickness of 1 μm or more, while containing silicon nitride and unavoidable impurities. The crystal grains of the silicon nitride have an average grain size of 300 nm or less in the film thickness direction, while having an average grain size of 500 nm or less in the in-plane direction. Consequently, the present invention is able to provide a ceramic laminate which has excellent mechanical characteristics, heat dissipation properties, insulation properties, heat resistance and reaction resistance, in particular, an insulating heat dissipation element which has excellent heat cycle reliability and high insulation withstand voltage.
(FR) L'invention concerne un stratifié de céramique qui a d'excellentes caractéristiques mécaniques, propriétés de dissipation de la chaleur, propriétés d'isolation, résistance à la chaleur et résistance à la réaction, en particulier un élément de dissipation de la chaleur isolant qui a une excellente fiabilité du cycle thermodynamique et une haute tension de tenue d'isolation. Le stratifié de céramique (1) selon la présente invention comprend un film de céramique (3) qui est formé sur une couche métallique (2) ; et le film de céramique (3) a une épaisseur minimale de film supérieure ou égale à 1 µm, tout en contenant du nitrure de silicium et des impuretés inévitables. Les grains cristallins de nitrure de silicium ont une taille moyenne de grain inférieure ou égale à 300 nm dans la direction de l'épaisseur du film, tout en ayant une taille moyenne de grain inférieure ou égale à 500 nm dans la direction dans le plan. Par conséquent, la présente invention permet de fournir un stratifié de céramique qui a d'excellentes caractéristiques mécaniques, propriétés de dissipation de la chaleur, propriétés d'isolation, résistance à la chaleur et résistance à la réaction, en particulier un élément de dissipation de la chaleur isolant qui a une excellente fiabilité du cycle thermodynamique et une haute tension de tenue d'isolation.
(JA) 優れた機械的特性、放熱性、絶縁性、耐熱性、耐反応性を有するセラミックス積層体、特に、優れた熱サイクル信頼性、高い絶縁耐圧を有した絶縁放熱体を提供する。 本発明によるセラミックス積層体1は、金属層2上にセラミックス膜3が形成されており、前記セラミックス膜3が、最小膜厚1μm以上であり、窒化珪素および不可避不純物を含んでなり、窒化珪素の結晶粒が膜厚方向で平均粒径300nm以下、面内方向で平均粒径500nm以下である。これにより、本発明では、優れた機械的特性、放熱性、絶縁性、耐熱性、耐反応性を有するセラミックス積層体、特に、優れた熱サイクル信頼性、高い絶縁耐圧を有した絶縁放熱体を提供できる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)