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1. (WO2017150524) MAGNETIC FILM SUITABLE FOR MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/150524 International Application No.: PCT/JP2017/007761
Publication Date: 08.09.2017 International Filing Date: 28.02.2017
IPC:
C23C 14/14 (2006.01) ,C22C 5/02 (2006.01) ,C23C 14/06 (2006.01) ,C23C 14/58 (2006.01) ,G11B 5/64 (2006.01) ,G11B 5/65 (2006.01) ,G11B 5/851 (2006.01) ,H01F 10/14 (2006.01) ,H01F 41/18 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
14
Metallic material, boron or silicon
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
C
ALLOYS
5
Alloys based on noble metals
02
Alloys based on gold
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
58
After-treatment
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
62
Record carriers characterised by the selection of the material
64
comprising only the magnetic material without bonding agent
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
62
Record carriers characterised by the selection of the material
64
comprising only the magnetic material without bonding agent
65
characterised by its composition
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
5
Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
84
Processes or apparatus specially adapted for manufacturing record carriers
851
Coating a support with a magnetic layer by sputtering
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
F
MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
10
Thin magnetic films, e.g. of one-domain structure
08
characterised by magnetic layers
10
characterised by the composition
12
being metals or alloys
14
containing iron or nickel
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
F
MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
41
Apparatus or processes specially adapted for manufacturing or assembling the devices covered by this subclass
14
for applying magnetic films to substrates
18
by cathode sputtering
Applicants:
JX金属株式会社 JX NIPPON MINING & METALS CORPORATION [JP/JP]; 東京都千代田区大手町一丁目1番2号 1-2, Otemachi 1-chome, Chiyoda-ku, Tokyo 1008164, JP
Inventors:
高見 英生 TAKAMI Hideo; JP
佐藤 敦 SATO Atsushi; JP
矢作 政隆 YAHAGI Masataka; JP
Agent:
小越 勇 OGOSHI Isamu; JP
小越 一輝 OGOSHI Kazuteru; JP
Priority Data:
2016-04114603.03.2016JP
Title (EN) MAGNETIC FILM SUITABLE FOR MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCING SAME
(FR) FILM MAGNÉTIQUE ADAPTÉ À UN SUPPORT D’ENREGISTREMENT MAGNÉTIQUE, ET PROCÉDÉ DE FABRICATION DE CELUI-CI
(JA) 磁気記録媒体に適した磁性膜及びその製造方法
Abstract:
(EN) A film which is composed of a non-magnetic material and a magnetic metal containing Fe and Pt, and which is characterized by additionally containing Mg and having a composition represented by (Fe1-αPtα)1-βMgβ (wherein α and β are numbers satisfying 0.35 ≤ α ≤ 0.55 and 0.01 ≤ β ≤ 0.2) in terms of an atomic ratio. The objective of the present invention is to obtain a magnetic thin film which is formed by means of sputtering and is decreased in the heat treatment temperature for developing an L10 ordered structure.
(FR) L’invention concerne un film qui est constitué d’un métal magnétique contenant un Fe et un Pt, et d’un matériau non magnétique. Ce film est caractéristique en ce qu’il comprend un Mg, et possède une composition représentée par la formule (Fe1-αPtα1-βMgβ (α et β représentent des nombres satisfaisant 0,35≦α≦0,55 et 0,01≦β≦0,2) selon un rapport atomique. Plus précisément, l’invention concerne un film mince magnétique formé par pulvérisation cathodique, et a pour objet de réduire une température de traitement thermique destiné à développer une structure ordonnée L1.
(JA) Fe及びPtを含む磁性金属と非磁性材料とからなる膜であって、さらにMgを含有し、原子数比で(Fe1-αPtα1-βMgβ(α、βは、0.35≦α≦0.55、0.01≦β≦0.2を満たす数)で表される組成を有することを特徴とする膜。 スパッタリングで形成した磁性薄膜であって、L1規則構造を発現するための熱処理温度を低下させることを課題とする。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)