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1. (WO2017150261) METHOD FOR MANUFACTURING PATTERN STACKED BODY, METHOD FOR MANUFACTURING INVERTED PATTERN, AND PATTERN STACKED BODY

Pub. No.:    WO/2017/150261    International Application No.:    PCT/JP2017/006243
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Feb 22 00:59:59 CET 2017
IPC: H01L 21/027
H01L 21/3065
Applicants: FUJIFILM CORPORATION
富士フイルム株式会社
Inventors: GOTO Yuichiro
後藤 雄一郎
MARUMO Kazuhiro
丸茂 和博
Title: METHOD FOR MANUFACTURING PATTERN STACKED BODY, METHOD FOR MANUFACTURING INVERTED PATTERN, AND PATTERN STACKED BODY
Abstract:
The purpose of the present invention is to provide a method for manufacturing a pattern stacked body that has reduced swelling (Δ line wise roughness (ΔLWR)) after etching. The method for manufacturing a pattern stacked body (20) comprises a step of forming a first layer (1) including a pattern on a member to be processed (10), and a step of forming a second layer (2) on the first layer (1), wherein the first layer (1) has a glass transition temperature of not lower than 90°C.