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1. (WO2017150212) METHOD FOR PRODUCING ALUMINUM OXIDE FILM AND PRODUCTION STARTING MATERIAL FOR ALUMINUM OXIDE FILM

Pub. No.:    WO/2017/150212    International Application No.:    PCT/JP2017/005852
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Feb 18 00:59:59 CET 2017
IPC: C23C 16/44
C07F 5/06
C23C 16/40
H01L 21/316
Applicants: UBE INDUSTRIES, LTD.
宇部興産株式会社
Inventors: SHIRAI, Masashi
白井 昌志
NIHEI, Hiroshi
二瓶 央
MIYAZAKI, Takamasa
宮崎 貴匡
MUKAI, Junichi
向 純一
Title: METHOD FOR PRODUCING ALUMINUM OXIDE FILM AND PRODUCTION STARTING MATERIAL FOR ALUMINUM OXIDE FILM
Abstract:
A method for producing an aluminum oxide film, wherein an aluminum oxide film is formed by supplying an aluminum compound having a specific structure onto an object of film formation, which has been heated to 300-550°C, thereby oxidizing the aluminum compound.