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1. (WO2017150201) SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING BODY

Pub. No.:    WO/2017/150201    International Application No.:    PCT/JP2017/005734
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Fri Feb 17 00:59:59 CET 2017
IPC: G01P 15/08
G01P 15/125
H01L 29/84
Applicants: SEIKO EPSON CORPORATION
セイコーエプソン株式会社
Inventors: MATSUURA Yoshiyuki
松浦 由幸
Title: SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING BODY
Abstract:
Through the present invention, electrostatic attraction between a sensor part (movable body) and an insulation part in which a base substrate (base) is exposed is reduced, and adhesion of the sensor part (movable body) to the base substrate is suppressed. An acceleration sensor 100 (sensor device) has: a base 10 provided with a recess (second recess), a fixed electrode, and a dummy electrode arranged in parallel fashion via an insulation part; and a movable body 20 supported on the base so as to be able to oscillate; the movable body having a first region facing the fixed electrode, a second region facing a portion of the dummy electrode, and a junction part connecting the first region and the second region, the fixed electrode being provided with an extension electrode part extending to a position facing the junction part, and, in plan view of the movable part, at least a portion of the extension electrode part facing the junction part, and the insulation part between the extension electrode part and the dummy electrode facing the junction part within the recess.