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1. (WO2017150005) CONVEYANCE SYSTEM

Pub. No.:    WO/2017/150005    International Application No.:    PCT/JP2017/002313
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Jan 25 00:59:59 CET 2017
IPC: B65G 1/04
H01L 21/677
B65G 1/00
Applicants: MURATA MACHINERY, LTD.
村田機械株式会社
Inventors: SUZUKI Takashi
鈴木 高志
Title: CONVEYANCE SYSTEM
Abstract:
A conveyance system 100 is provided with: a travel rail 4 that has multiple first rails 9 and multiple second rails 11, such that the first rails 9 and the second rails 11 are arranged in a grid on the same plane; and multiple carts 8 that have a travel part 24 capable of traveling on the travel rail 4 in a first direction and a second direction, and a transfer part 26 comprising a support part 46A for supporting a carrier 50 and an elevating part 45 for elevating the support part 46A, wherein the travel rail 4 is arranged such that the carts 8 can enter into a first stop position in which the transfer part 26 is disposed directly upon each transfer port in a first treatment device group for performing a treatment in a predetermined step, and the carts 8 can enter from the first stop position into a second stop position in which the transfer part 26 is disposed directly upon each transfer port in a second treatment device group for performing a treatment in a step that is different than the predetermined step.