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1. (WO2017149992) IMPRINTING DEVICE, IMPRINTING METHOD AND ARTICLE PRODUCTION METHOD

Pub. No.:    WO/2017/149992    International Application No.:    PCT/JP2017/002097
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Tue Jan 24 00:59:59 CET 2017
IPC: H01L 21/027
B29C 59/02
Applicants: CANON KABUSHIKI KAISHA
キヤノン株式会社
Inventors: YONEKAWA, Masami
米川 雅見
Title: IMPRINTING DEVICE, IMPRINTING METHOD AND ARTICLE PRODUCTION METHOD
Abstract:
This imprinting device (IMP) brings a mold into contact with an imprint material on a base board (101) and causes the imprint material to cure, thereby forming a pattern over the base board (101). This imprinting device (IMP) comprises a base board chuck (102) holding the base board (101), a base board periphery member (113) disposed in the periphery of the base board chuck (102), a mold chuck (110) for holding the mold (100), a mold periphery member (161) disposed in the periphery of the mold chuck (110), and a power source (PS) for supplying a voltage containing an alternating current component between the base board periphery member (113) and the mold periphery member (161).