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1. (WO2017149912) SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE
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Pub. No.: WO/2017/149912 International Application No.: PCT/JP2016/088196
Publication Date: 08.09.2017 International Filing Date: 21.12.2016
Chapter 2 Demand Filed: 14.11.2017
IPC:
G01B 11/24 (2006.01) ,G01B 9/02 (2006.01) ,G01S 17/10 (2006.01) ,G01S 17/89 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
G PHYSICS
01
MEASURING; TESTING
S
RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17
Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02
Systems using the reflection of electromagnetic waves other than radio waves
06
Systems determining position data of a target
08
for measuring distance only
10
using transmission of interrupted pulse-modulated waves
G PHYSICS
01
MEASURING; TESTING
S
RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17
Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88
Lidar systems, specially adapted for specific applications
89
for mapping or imaging
Applicants:
国立大学法人電気通信大学 THE UNIVERSITY OF ELECTRO-COMMUNICATIONS [JP/JP]; 東京都調布市調布ケ丘一丁目5番地1 1-5-1, Chofugaoka, Chofu-shi, Tokyo 1828585, JP
Inventors:
美濃島 薫 MINOSHIMA Kaoru; JP
Agent:
棚井 澄雄 TANAI Sumio; JP
小林 淳一 KOBAYASHI Junichi; JP
清水 雄一郎 SHIMIZU Yuichiro; JP
Priority Data:
2016-04006102.03.2016JP
Title (EN) SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT DEVICE
(FR) PROCÉDÉ DE MESURE DE FORME ET DISPOSITIF DE MESURE DE FORME
(JA) 形状測定方法及び形状測定装置
Abstract:
(EN) A shape measurement method to which the present invention is applied is provided with: a step for irradiating an object to be measured with a light pulse stream in which a plurality of light pulses having a prescribed frequency distribution with respect to a time axis are disposed in a consecutive sequence in time series; and a step for measuring the optical shape of the object to be measured using the correspondence relationship between the sequence numbers of the light pulses of a plurality of light pulse streams to be received after the emitted light pulses are applied to the object to be measured, and using the correspondence relationship between the frequency distributions in the light pulses.
(FR) La présente invention est appliquée à un procédé de mesure de forme qui comprend : une étape consistant à éclairer un objet à mesurer avec un train d'impulsions lumineuses dans lequel une pluralité d'impulsions lumineuses ayant une distribution fréquentielle prédéterminée par rapport à un axe temporel sont disposées dans une séquence consécutive en série temporelle ; et une étape consistant à mesurer la forme optique de l'objet à mesurer à l'aide de la relation de correspondance entre les numéros de séquence des impulsions lumineuses d'une pluralité de trains d'impulsions lumineuses à recevoir après que les impulsions lumineuses émises sont appliquées à l'objet à mesurer, et utiliser la relation de correspondance entre les distributions fréquentielles dans les impulsions lumineuses.
(JA) 本発明を適用した形状測定方法は、時間軸に対する所定の周波数分布を有する光パルスが時系列に番号順に複数配された光パルス列を被測定物体に照射する工程と、出射された前記光パルスが前記被測定物体に作用した後の複数の受光対象光パルス列同士の前記光パルスの前記番号の対応関係と、前記光パルス内の前記周波数分布の対応関係とによって前記被測定物体の光学的形状を測定する工程と、を備えている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)