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1. (WO2017149890) PROTECTIVE FILM-FORMING COMPOSITE SHEET

Pub. No.:    WO/2017/149890    International Application No.:    PCT/JP2016/086539
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Fri Dec 09 00:59:59 CET 2016
IPC: H01L 21/301
H01L 23/00
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: SAIKI Naoya
佐伯 尚哉
SASAKI Haruka
佐々木 遼
YONEYAMA Hiroyuki
米山 裕之
YAMAMOTO Daisuke
山本 大輔
Title: PROTECTIVE FILM-FORMING COMPOSITE SHEET
Abstract:
This protective film-forming composite sheet is provided with a support sheet, is provided with a protective film-forming film on one surface of the support sheet, and is provided with a coating layer on the surface of the support sheet opposite of where the protective film-forming film is provided, wherein the surface roughness Ra of the surface of the coating layer opposite of the side contacting the support sheet is less than the surface roughness Ra of the surface of the support sheet on the side where the coating layer is provided.