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1. (WO2017149862) FIELD EMISSION ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE

Pub. No.:    WO/2017/149862    International Application No.:    PCT/JP2016/084726
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Fri Nov 25 00:59:59 CET 2016
IPC: H01J 1/304
H01J 9/02
H01J 37/06
H01J 37/073
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: KUSUNOKI Toshiaki
楠 敏明
HASHIZUME Tomihiro
橋詰 富博
KASUYA Keigo
糟谷 圭吾
OHSHIMA Takashi
大嶋 卓
SAKAI Yusuke
酒井 佑輔
OSE Yoichi
小瀬 洋一
ARAI Noriaki
荒井 紀明
Title: FIELD EMISSION ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE
Abstract:
In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament (107), a metal tube (108) joined thereto, a hexaboride tip (104) that emits electrons, and graphite sheets (109) that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.