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1. (WO2017149833) NOZZLE FOR SUBSTRATE ANALYSIS

Pub. No.:    WO/2017/149833    International Application No.:    PCT/JP2016/081508
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Oct 26 01:59:59 CEST 2016
IPC: G01N 1/28
G01N 1/32
Applicants: IAS INC.
株式会社 イアス
Inventors: KAWABATA Katsuhiko
川端 克彦
LEE Sungjae
イー ソンジェ
ICHINOSE Tatsuya
一之瀬 達也
Title: NOZZLE FOR SUBSTRATE ANALYSIS
Abstract:
The present invention provides a nozzle for substrate analysis with which it becomes possible to conduct analysis reliably without causing leakage of analyzing liquid even if a substrate having highly hydrophilic properties is swept with the analyzing liquid. The present invention provides a nozzle for substrate analysis, the nozzle being constituted of a duplex tube consisting of a nozzle body that ejects and sucks analyzing liquid and an outer tube disposed at an outer circumference of the nozzle body so as to surround the analyzing liquid used for sweeping, and the nozzle including a discharge means in which a space between the nozzle body and the outer tube serves as a gas discharge path, the nozzle being characterized in that a gas blowing tube for blowing inert gas toward the distal end of the nozzle body in a direction substantially parallel to the substrate surface is disposed on the outer circumferential side at the distal end of the outer tube on the opposite side of the sweeping direction of the nozzle.