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1. (WO2017149712) LASER DEVICE, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

Pub. No.:    WO/2017/149712    International Application No.:    PCT/JP2016/056511
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Thu Mar 03 00:59:59 CET 2016
IPC: H01S 3/10
H01S 3/104
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: KUROSAWA Yoshiaki
黒澤 義明
Title: LASER DEVICE, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Abstract:
A laser device may be provided with: a master oscillator; at least one amplifier; a power supply; and a controller for controlling the power supply. The controller controls the power supply so that the excitation intensity of the at least one amplifier during the period when burst oscillation is performed is a first excitation intensity; when a prescribed repetition frequency is a first repetition frequency, controls the power supply so that the excitation intensity of the at least one amplifier during the oscillation stop period is a second excitation intensity that is the same or less than the first excitation intensity; and when the prescribed repetition frequency is a second repetition frequency greater than the first repetition frequency, controls the power supply so that the excitation intensity of the at least one amplifier during the oscillation stop period is a third excitation intensity less than the second excitation intensity.