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1. (WO2017149675) PIEZOELECTRIC FILM, METHOD FOR PRODUCING SAME, AND PIEZOELECTRIC COMPONENT USING PIEZOELECTRIC FILM

Pub. No.:    WO/2017/149675    International Application No.:    PCT/JP2016/056303
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Mar 02 00:59:59 CET 2016
IPC: H03H 9/17
C23C 14/34
C30B 29/38
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: UMEDA, Keiichi
梅田 圭一
MIZUNO, Takaaki
水野 孝昭
Title: PIEZOELECTRIC FILM, METHOD FOR PRODUCING SAME, AND PIEZOELECTRIC COMPONENT USING PIEZOELECTRIC FILM
Abstract:
Provided is an AlN piezoelectric film wherein the piezoelectric constant is improved, while suppressing the generation of a film stress. A piezoelectric film which is formed of an aluminum nitride crystal having a wurtzite structure, and wherein the aluminum nitride crystal has a structure in which scandium atoms and boron atoms are contained and some of aluminum atoms in the aluminum nitride crystal are substituted by scandium atoms or boron atoms.