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1. (WO2017149516) BAW DEVICE

Pub. No.:    WO/2017/149516    International Application No.:    PCT/IB2017/051268
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Mar 04 00:59:59 CET 2017
IPC: H03H 9/17
Applicants: SNAPTRACK, INC.
Inventors: CARUYER, Dr. Gregory
SCHWOEBEL, Andre
MOULARD, Dr. Gilles
Title: BAW DEVICE
Abstract:
The invention relates to a BAW device having a piezoelectric layer with a superior crystal structure. The BAW device has a layer sequence comprising a first electrode layer (E1), a dielectric buffer layer (BL), a piezoelectric layer (PL) and a second electrode layer (E2).