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1. (WO2017149273) INTEGRATED MEMS TRANSDUCER AND CIRCUITRY

Pub. No.:    WO/2017/149273    International Application No.:    PCT/GB2017/050437
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Feb 22 00:59:59 CET 2017
IPC: B81C 1/00
Applicants: CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LIMITED
Inventors: HOEKSTRA, Tsjerk Hans
Title: INTEGRATED MEMS TRANSDUCER AND CIRCUITRY
Abstract:
The application relates to integrated MEMS transducers comprising a MEMS transducer structure formed of a plurality of transducer layers and at least one circuit component formed from a plurality of circuitry (CMOS) layers. The integrated MEMS transducer further comprises a conductive enclosure that is integral to the transducer layers and circuitry layers. The at least one circuit component is inside the conductive enclosure whilst the MEMS transducer structure is outside the enclosure.