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1. (WO2017148668) XPS AND RAMAN SAMPLE ANALYSIS SYSTEM AND METHOD
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Pub. No.: WO/2017/148668 International Application No.: PCT/EP2017/052757
Publication Date: 08.09.2017 International Filing Date: 08.02.2017
IPC:
G01N 21/65 (2006.01) ,G01N 23/227 (2006.01) ,G01J 3/44 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
62
Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63
optically excited
65
Raman scattering
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
22
by measuring secondary emission
227
by measuring photoelectric effect, e.g. Auger electrons
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28
Investigating the spectrum
44
Raman spectrometry; Scattering spectrometry
Applicants:
VG SYSTEMS LIMITED [GB/GB]; 3rd Floor, 1 Ashley Road Altrincham WA14 2DT, GB
THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC [US/US]; 5225 Verona Road Madison, 53711, US
Inventors:
NUNNEY, Timothy Sion; GB
GLENISTER, Christopher Kenneth; GB
MEYER, Matthew Wayne; US
HIBBARD, Noah; US
Agent:
PARLETT, Peter; DE
Priority Data:
62/303,52804.03.2016US
Title (EN) XPS AND RAMAN SAMPLE ANALYSIS SYSTEM AND METHOD
(FR) SYSTÈME ET PROCÉDÉ D'ANALYSE D'ÉCHANTILLON XPS ET RAMAN
Abstract:
(EN) A process of analyzing a sample by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) includes providing a sample having a sample surface within a vacuum chamber, performing a Raman spectroscopic analysis on a plurality of selected areas of the sample surface within the vacuum chamber to map an area of the sample surface comprising the selected areas, the Raman spectroscopic analysis including identifying one or more chemical and/or structural features of the sample surface in one or more of the selected areas of the sample surface, and performing an X-ray photoelectron spectroscopy (XPS) analysis of one or more selected areas of the sample surface containing at least one chemical and/or structural feature identified by the Raman spectroscopic analysis, wherein the duration of the XPS analysis of a given selected area of the sample surface is longer than the duration of the Raman spectroscopic analysis of that given selected area.
(FR) La présente invention se rapporte à un procédé d'analyse d'un échantillon par spectroscopie Raman et par spectroscopie de photoélectrons X (XPS), qui consiste à utiliser un échantillon ayant une surface d'échantillon à l'intérieur d'une chambre à vide, à effectuer une analyse spectroscopique Raman sur une pluralité de zones sélectionnées de la surface d'échantillon à l'intérieur de la chambre à vide afin de mapper une zone de ladite surface d'échantillon comprenant les zones sélectionnées, l'analyse spectroscopique Raman incluant l'identification d'une ou plusieurs caractéristiques chimiques et/ou structurales de la surface d'échantillon dans une ou plusieurs des zones sélectionnées de cette surface d'échantillon, et à effectuer une analyse par spectroscopie de photoélectrons X (XPS) d'une ou plusieurs zones sélectionnées de la surface d'échantillon contenant au moins une caractéristique chimique et/ou structurale identifiée par l'analyse spectroscopique Raman, la durée de l'analyse XPS d'une zone sélectionnée donnée de ladite surface d'échantillon étant plus longue que la durée de l'analyse spectroscopique Raman de cette zone sélectionnée donnée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)