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1. (WO2017148660) PRESSURE SENSOR

Pub. No.:    WO/2017/148660    International Application No.:    PCT/EP2017/052643
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Wed Feb 08 00:59:59 CET 2017
IPC: G01L 19/00
G01L 9/00
Applicants: METALLUX AG
Inventors: KRALIK, Thomas
STUHR, Frank
GÖPFRICH, Armin
Title: PRESSURE SENSOR
Abstract:
The invention relates to a pressure sensor (1) comprising a monolithic main part (2) which has an annular region (3) and a membrane region (4). The annular region (3) encloses a cavity (6) in the circumferential direction (5), and the membrane region (4) closes the cavity (6) at an axial end of the annular region (3). Additionally, an internal electric circuit (9) is provided which has a measuring region (10) that is arranged on the membrane region (4) on an axial main part (2) outer face (14) facing away from the cavity (6). A simplified design is produced if an annular disc (15) is provided which is arranged on the axial main part (2) outer face (14) and which has an annular body (16) and a central opening (17) that is completely surrounded by the annular body (16) in the circumferential direction (5), if the measuring region (10) is arranged within the central opening (17) and is enclosed by the annular body (16) in the circumferential direction (5), and if a disc-shaped cover (18) is provided which is arranged on an axial annular disc (15) outer face (19) facing away from the main part (2) and which covers the central opening (17).