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1. (WO2017148650) VIBRATION ISOLATOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Pub. No.:    WO/2017/148650    International Application No.:    PCT/EP2017/052343
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Feb 04 00:59:59 CET 2017
IPC: G03F 7/20
F16F 15/02
F16F 15/023
F16F 15/027
F16F 9/02
Applicants: ASML NETHERLANDS B.V.
Inventors: BUTLER, Hans
DE HOON, Cornelius, Adrianus, Lambertus
JACOBS, Fransiscus, Mathijs
KAGAN, Pavel
STARREVELD, Jeroen, Pieter
WIJCKMANS, Maurice, Willem, Jozef, Etiënne
Title: VIBRATION ISOLATOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Abstract:
The invention relates to a vibration isolator (VI), comprising: a base (10); a coupling element (20) to be coupled to a vibration sensitive object; a decoupling mass (30); a first vibration isolator part (31) arranged between the base (10) and the decoupling mass (30); and a second vibration isolator part (40) arranged between the decoupling mass (30) and the coupling element (20), and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.