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1. (WO2017148098) OPTICAL WAVEGUIDE DETECTOR AND OPTICAL MODULE

Pub. No.:    WO/2017/148098    International Application No.:    PCT/CN2016/092994
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Thu Aug 04 01:59:59 CEST 2016
IPC: H01L 31/0232
H01L 31/028
Applicants: HUAWEI TECHNOLOGIES CO.,LTD.
华为技术有限公司
PEKING UNIVERSITY
北京大学
Inventors: FEI, Yonghao
费永浩
CUI, Jishi
崔积适
ZHU, Yisheng
朱以胜
Title: OPTICAL WAVEGUIDE DETECTOR AND OPTICAL MODULE
Abstract:
An optical waveguide detector and an optical module. The optical waveguide detector comprises: a waveguide layer (3), an upper cladding layer (3), and an electrode layer (5) that are stacked in a first direction. The waveguide layer (2) comprises a silicon waveguide layer (21) and a germanium waveguide layer (22). The germanium waveguide layer (22) is located between the silicon waveguide layer (21) and the upper cladding layer (3). The silicon waveguide layer (21) comprises a P-type heavily-doped silicon area (211), a P-type lightly-doped silicon area (212), an N-type lightly-doped silicon area (214), and an N-type heavily-doped silicon area (213) that are arranged in a second direction perpendicular to the first direction. The germanium waveguide layer (22) comprises a first heavily-doped germanium area (222) and an undoped germanium area (221). A first surface (U) of the germanium waveguide layer (22) comprises the surface of the first heavily-doped germanium area (222), and is the surface of the germanium waveguide layer (22) facing away from the silicon waveguide layer (21) in the first direction. The width of the first heavily-doped germanium area (222) is less than or equal to half the width of the first surface (U), and the thickness of the first heavily-doped germanium area (222) is greater than or equal to 5 nm and is less than or equal to 200 nm. The upper cladding layer comprises a metal via (42) that connects the first heavily-doped germanium area (222) to the electrode layer (5). According to the embodiments, the bandwidth of an optical waveguide detector can be effectively increased.