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1. (WO2017148036) MASK REPAIRING APPARATUS AND METHOD, AND VAPOR DEPOSITION SYSTEM

Pub. No.:    WO/2017/148036    International Application No.:    PCT/CN2016/084945
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Tue Jun 07 01:59:59 CEST 2016
IPC: C23C 14/04
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
Inventors: FU, Wenyue
付文悦
CUI, Wei
崔伟
Title: MASK REPAIRING APPARATUS AND METHOD, AND VAPOR DEPOSITION SYSTEM
Abstract:
A mask repairing apparatus and method, and a vapor deposition system. A mask repairing apparatus (100) comprises: a repairing device (20) constructed to repair a part to be repaired of a mask (11); and a moving mechanism (30) mounted in an area (11') facing the mask and constructed to drive the repairing device (20) to move to a position corresponding to the part to be repaired of the mask (11). The repairing apparatus (100) may be mounted in a vacuum vapor deposition chamber, such that there is no need to take the mask (11) out of the vapor deposition chamber, thereby reducing the repair workload.