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1. (WO2017147974) METHOD OF MANUFACTURING ARRAY PANEL AND ARRAY PANEL MANUFACTURED THEREBY

Pub. No.:    WO/2017/147974    International Application No.:    PCT/CN2016/078878
Publication Date: Sat Sep 09 01:59:59 CEST 2017 International Filing Date: Sat Apr 09 01:59:59 CEST 2016
IPC: H01L 21/77
G02F 1/1362
H01L 27/12
Applicants: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO.,LTD.
深圳市华星光电技术有限公司
Inventors: GAN, Qiming
甘启明
WANG, Meng
王勐
Title: METHOD OF MANUFACTURING ARRAY PANEL AND ARRAY PANEL MANUFACTURED THEREBY
Abstract:
A method of manufacturing an array panel and an array panel manufactured thereby use a photomask to implement hole formation on a planarization layer (50) and a passivation layer (40), saving a photomask, reducing manufacturing costs, and decreasing manufacturing time in comparison to the prior art. When forming a common electrode (60), an electrically conductive connection layer (45) enclosing a first through hole (51) on the planarization layer and a second through hole (51) on the planarization layer is simultaneously formed, thereby preventing a source/drain (30) and the planarization layer from exposing to the environment, eliminating possibility of the two layers having a reaction, facilitating an increase in electrical performance of the array panel, and implementing signal transmission. The array panel manufactured according to the invention provides smooth signal transmission and has favorable electrical performance.