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1. (WO2017139495) MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/139495 International Application No.: PCT/US2017/017242
Publication Date: 17.08.2017 International Filing Date: 09.02.2017
IPC:
H01L 21/673 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
Applicants:
ENTEGRIS, INC. [US/US]; 129 Concord Road, Building 2 Billerica, MA 01821, US
Inventors:
SMITH, Mark, V.; US
GALLAGHER, Gary, M.; US
GREGERSON, Barry; US
FULLER, Matthew, A.; US
JOHNSON, Michael L.; US
Agent:
SZYMANSKI, Brian, E.; US
KISSOON, Nidhi, G.; US
PILLION, John, E.; US
GATES, Catherine, D.; US
Priority Data:
62/293,24009.02.2016US
62/294,19411.02.2016US
Title (EN) MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES
(FR) MICRO-ENVIRONNEMENT POUR SUBSTRATS FLEXIBLES
Abstract:
(EN) A substrate container (1100) includes a shell (1105) defining an opening and a door (1505) for selectively sealing the opening. A cantilevered support tray (1120) supports a substrate (1115) within the shell (1105). The support tray (1120) includes a support collar (1300) for coupling the support tray (1120) to a support post (1215) such that the support tray (1120) is cantilevered from the support post (1215).
(FR) L'invention concerne un contenant (1100) pour substrats qui comprend une enveloppe (1105) définissant une ouverture et une porte (1505) pour fermer sélectivement l'ouverture. Un plateau de support en porte-à-faux (1120) porte un substrat (1115) à l'intérieur de l'enveloppe (1105). Le plateau de support (1120) comprend un collier de support (1300) qui permet de coupler le plateau de support (1120) à un montant de support (1215) de façon que le plateau de support (1120) est en porte-à-faux par rapport au montant de support (1215).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN108886010