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1. (WO2017137266) DEVICE AND METHOD FOR MOIRÉ MEASUREMENT OF AN OPTICAL TEST SPECIMEN
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/137266 International Application No.: PCT/EP2017/051759
Publication Date: 17.08.2017 International Filing Date: 27.01.2017
IPC:
G03F 7/20 (2006.01) ,G01M 11/02 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
01
MEASURING; TESTING
M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11
Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02
Testing of optical properties
Applicants:
CARL ZEISS SMT GMBH [DE/DE]; Rudolf-Eber-Strasse 2 73447 Oberkochen, DE (AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BE, BF, BG, BH, BJ, BN, BR, BW, BY, BZ, CA, CF, CG, CH, CI, CL, CM, CN, CO, CR, CU, CY, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, FR, GA, GB, GD, GE, GH, GM, GN, GQ, GR, GT, GW, HN, HR, HU, ID, IE, IL, IN, IR, IS, IT, JP, KE, KG, KH, KM, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MC, MD, ME, MG, MK, ML, MN, MR, MT, MW, MX, MY, MZ, NA, NE, NG, NI, NL, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SI, SK, SL, SM, SN, ST, SV, SY, SZ, TD, TG, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, UZ, VC, VN, ZA, ZM, ZW)
SAMANIEGO, Michael [DE/DE]; DE (US)
SCHADE, Peter [DE/DE]; DE (US)
KEIL, Michael [DE/DE]; DE (US)
JÄNKER, Bernd [DE/DE]; DE (US)
Inventors:
SAMANIEGO, Michael; DE
SCHADE, Peter; DE
KEIL, Michael; DE
JÄNKER, Bernd; DE
Agent:
FRANK, Hartmut; DE
Priority Data:
10 2016 202 198.212.02.2016DE
Title (DE) VORRICHTUNG UND VERFAHREN ZUR MOIRÉ-VERMESSUNG EINES OPTISCHEN PRÜFLINGS
(EN) DEVICE AND METHOD FOR MOIRÉ MEASUREMENT OF AN OPTICAL TEST SPECIMEN
(FR) DISPOSITIF ET PROCÉDÉ DE MESURE DE MOIRAGE D’UN ÉCHANTILLON OPTIQUE
Abstract:
(DE) Die Erfindung betrifft eine Vorrichtung zur Moiré-Vermessung eines optischen Prüflings, mit einer Gitteranordnung aus einem ersten, im optischen Strahlengang vor dem Prüfling positionierbaren Gitter (25, 25', 35, 35') und einem zweiten, im optischen Strahlengang nach dem Prüfling positionierbaren Gitter (11, 11', 11", 41, 51, 61, 71, 81, 91, 101, 111, 121, 131, 141), einer Auswerteeinheit mit wenigstens einem Detektor (12, 12', 12", 22, 22', 32, 32', 42, 52, 62, 72, 82, 92, 102, 112, 122, 132, 142) zur Auswertung von durch Überlagerung der beiden Gitter in einer im optischen Strahlengang nach dem zweiten Gitter befindlichen Detektionsebene erzeugten Moiré-Strukturen, und wenigstens einer Aperturblende (14, 14', 14", 24, 24', 34, 34'), durch welche die nach Lichtaustritt aus dem zweiten Gitter entstandene Lichtverteilung derart bereichsweise abgeschattet werden kann, dass nur Licht einer Untermenge aller Feldpunkte auf dem zweiten Gitter die Detektionsebene erreicht.
(EN) The invention relates to a device for Moiré measurement of an optical test specimen, comprising a grating arrangement composed of a first grating (25, 25', 35, 35'), which is positionable in the optical beam path upstream of the test specimen, and a second grating (11, 11', 11", 41, 51, 61, 71, 81, 91, 101, 111, 121, 131, 141), which is positionable in the optical beam path downstream of the test specimen, an evaluation unit having at least one detector (12, 12', 12", 22, 22', 32, 32', 42, 52, 62, 72, 82, 92, 102, 112, 122, 132, 142) for evaluating Moiré structures produced by superimposition of the two gratings in a detection plane situated in the optical beam path downstream of the second grating, and at least one aperture stop (14, 14', 14", 24, 24', 34, 34'), by which the light distribution produced after emergence of light from the second grating can be shaded regionally in such a way that only light of a subset of all field points on the second grating reaches the detection plane.
(FR) L’invention concerne un dispositif de mesure de moirage d’un échantillon optique, lequel dispositif comprend un ensemble de trames constitué d’une première trame (25, 25’, 35, 35’) pouvant être positionnée dans le trajet optique en avant de l’échantillon et d’une seconde trame (11, 11’, 11’’, 41, 51, 61, 71, 81, 91, 101, 111, 121, 131, 141) pouvant être positionnée dans le trajet optique en aval de l’échantillon, une unité d’évaluation, comportant au moins un détecteur (12, 12’, 12’’, 22, 22’, 32, 32’, 42, 52, 62, 72, 82, 92, 102, 112, 122, 132, 142), destinée à évaluer des structures de moirage générées, par superposition des deux trames, dans un plan de détection en aval de la seconde trame dans le trajet optique, et au moins un diaphragme (14, 14’, 14’’, 24, 24’, 34, 34’) qui permet d’occulter par endroits la distribution de lumière après la sortie de la lumière de la seconde trame de sorte que seulement la lumière d’un sous-ensemble de tous les points de champ sur la seconde trame atteigne le plan de détection.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)
Also published as:
KR1020180102129CN108700822EP3414625