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1. (WO2017137181) MULTIPHASE LINEAR MOTOR, MULTIPHASE PLANAR MOTOR, STAGE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/137181 International Application No.: PCT/EP2017/050199
Publication Date: 17.08.2017 International Filing Date: 05.01.2017
IPC:
H02K 41/03 (2006.01) ,H02K 3/28 (2006.01) ,H02K 29/03 (2006.01) ,H02K 7/09 (2006.01)
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
41
Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
02
Linear motors; Sectional motors
03
Synchronous motors; Motors moving step by step; Reluctance motors
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
3
Details of windings
04
Windings characterised by the conductor shape, form, or construction, e.g. with bar conductor
28
Layout of windings or of connections between windings
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
29
Motors or generators having non-mechanical commutating devices, e.g. discharge tubes, semiconductor devices
03
with a magnetic circuit specially adapted for avoiding torque ripples or self-starting problems
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
7
Arrangements for handling mechanical energy structurally associated with the machine, e.g. structural association with mechanical driving motor or auxiliary dynamo-electric machine
08
Structural association with bearings
09
with magnetic bearings
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
KIMMAN, Maarten, Hartger; NL
BRAAKSMA, Dave; NL
HEIJMANS, Peter, Michel, Silvester, Maria; NL
HOOGENDAM, Christiaan, Alexander; NL
Agent:
VERHOEVEN, Johannes; NL
Priority Data:
16155377.112.02.2016EP
16167411.428.04.2016EP
Title (EN) MULTIPHASE LINEAR MOTOR, MULTIPHASE PLANAR MOTOR, STAGE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
(FR) MOTEUR LINÉAIRE POLYPHASÉ, MOTEUR PLAN POLYPHASÉ, PLATINE, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ DE FABRICATION DE DISPOSITIF
Abstract:
(EN) An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
(FR) L'invention concerne un moteur électromagnétique, le moteur électromagnétique comprenant : un ensemble aimants configuré pour générer un champ magnétique alternatif bidimensionnel ayant un pas Pm1 dans une première direction et un pas Pm2 dans une seconde direction ; et un ensemble bobines configuré pour coopérer avec l'ensemble aimants afin de générer une première force dans la première direction et une seconde force dans la seconde direction, l'ensemble bobines comprenant un premier jeu de bobines comprenant une pluralité de premières bobines pour générer la première force et un second jeu de bobines comprenant une pluralité de secondes bobines pour générer la seconde force, un rapport R1 d'un pas entre bobines Pc1 dans le premier jeu de bobines dans la première direction sur Pm1 étant différent d'un rapport R2 d'un pas entre bobines Pc2 dans le second jeu de bobines dans la seconde direction sur Pm2.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
CN108604853US20190036405