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1. (WO2017136097) PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACTUATORS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/136097 International Application No.: PCT/US2017/012435
Publication Date: 10.08.2017 International Filing Date: 06.01.2017
IPC:
G05B 11/42 (2006.01) ,B25J 9/16 (2006.01)
G PHYSICS
05
CONTROLLING; REGULATING
B
CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
11
Automatic controllers
01
electric
36
with provision for obtaining particular characteristics, e.g. proportional, integral, differential
42
for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
16
Programme controls
Applicants:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US/US]; 35 Dory Road Gloucester, Massachusetts 01930, US
Inventors:
LOPICCOLO, Jack J.; US
MITCHELL, Robert J.; US
Agent:
DAISAK, Daniel N.; US
Priority Data:
15/012,28401.02.2016US
15/061,31804.03.2016US
Title (EN) PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACTUATORS
(FR) COMMANDE PROPORTIONNELLE INTÉGRALE DÉRIVÉE COMPORTANT DE MULTIPLES ACTIONNEURS
Abstract:
(EN) Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.
(FR) Des modes de réalisation de l'invention concernent une commande proportionnelle intégrale dérivée (PID) utilisant de multiples actionneurs. Dans un mode de réalisation, un processus comprend la fourniture d'un dispositif de commande PID en communication avec un actionneur primaire et un actionneur secondaire, l'actionneur primaire et l'actionneur secondaire étant accouplés à un manipulateur. Le processus comprend en outre la réception d'une rétroaction de position et d'une trajectoire spécifiée destinées au manipulateur et la génération d'une instruction de force prédictive dynamique et d'une instruction de correction de position destinées au manipulateur sur la base de la rétroaction de position et de la trajectoire spécifiée. Le processus comprend en outre, à partir du dispositif de commande PID, l'instruction de force prédictive dynamique à l'actionneur secondaire et de l'instruction de correction de position à l'actionneur primaire.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)