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1. (WO2017136011) METHOD AND SYSTEM FOR OPTICAL THREE-DIMENSIONAL TOPOGRAPHY MEASUREMENT
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/136011 International Application No.: PCT/US2016/060599
Publication Date: 10.08.2017 International Filing Date: 04.11.2016
IPC:
G01N 21/956 (2006.01) ,G01N 21/39 (2006.01) ,G02B 27/22 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
39
using tunable lasers
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
22
for producing stereoscopic or other three-dimensional effects
Applicants:
KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive Milpitas, California 95035, US
Inventors:
ZHAO, Guoheng; US
VAN DER BURGT, Maarten; BE
LIU, Sheng; US
HILL, Andy; US
DE GREEVE, Johan; BE
VAN GILS, Karel; BE
Agent:
MCANDREWS, Kevin; US
MORRIS, Elizabeth M. N.; US
Priority Data:
62/289,88901.02.2016US
Title (EN) METHOD AND SYSTEM FOR OPTICAL THREE-DIMENSIONAL TOPOGRAPHY MEASUREMENT
(FR) PROCÉDÉ ET SYSTÈME DE MESURE TOPOGRAPHIQUE TRIDIMENSIONNELLE OPTIQUE
Abstract:
(EN) For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
(FR) Selon l'invention, pour la mesure de la topographie tridimensionnelle d'une surface d'un objet, un éclairage structuré est projeté sur la surface à travers un objectif. Un mouvement relatif entre l'objet et l'objectif est effectué, et plusieurs images de la surface sont enregistrées à travers l'objectif par un détecteur. La direction du mouvement relatif comprend un angle oblique avec un axe optique de l'objectif. Des informations de hauteur pour une position donnée sur la surface sont dérivées d'une variation de l'intensité enregistrée depuis la position respective. En outre, un éclairage structuré et un éclairage uniforme peuvent être projetés en alternance sur la surface, tandis que des images de la surface sont enregistrés pendant un mouvement relatif de l'objet et de l'objectif le long d'un axe optique de l'objectif. Un éclairage uniforme est utilisé pour obtenir des informations de hauteur pour des structures spéculaires sur la surface, un éclairage structuré est utilisé pour obtenir des informations de hauteur sur d'autres parties de la surface.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
US20180209784MYPI 2018001022SG11201805467TCN108603848KR1020180101612EP3411695
PH1/2018/501598