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1. (WO2017135683) LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/135683 International Application No.: PCT/KR2017/001095
Publication Date: 10.08.2017 International Filing Date: 02.02.2017
IPC:
G03F 7/20 (2006.01) ,F21K 9/60 (2016.01) ,F21V 5/04 (2006.01) ,F21V 29/70 ,F21V 8/00 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
[IPC code unknown for F21K 9/60]
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
21
LIGHTING
V
FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
5
Refractors for light sources
04
of lens shape
[IPC code unknown for F21V 29/70]
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
21
LIGHTING
V
FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
8
Use of light guides, e.g. fibre optic devices, in lighting devices or systems
Applicants:
조남직 CHO, Nam Jik [KR/KR]; KR
Inventors:
조남직 CHO, Nam Jik; KR
인치억 IN, Chi Eok; KR
박종원 PARK, Jong Won; KR
송우리 SONG, Woo Ree; KR
정해일 JUNG, Hae Il; KR
Agent:
특허법인 네이트 NEIT INTERNATIONAL PATENT LAW FIRM; 서울시 강남구 테헤란로6길 16, 4F(역삼동, 수산빌딩) (Yeoksam-dong,Susan B/D) 4F, 16, Teheran-ro 6-gil Gangnam-gu Seoul 06233, KR
Priority Data:
10-2016-001276802.02.2016KR
Title (EN) LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING SAME
(FR) UNITÉ DE MODULE DE SOURCE DE LUMIÈRE POUR EXPOSITION, ET DISPOSITIF D'EXPOSITION LA COMPRENANT
(KO) 노광용 광원모듈 유닛 및 그 광원모듈 유닛이 구비된 노광장치
Abstract:
(EN) The present invention provides a light source module unit for exposure. The light source module unit for exposure according to the present invention comprises: a light source panel having multiple ultraviolet light-emitting elements configured in an array structure; and an optical panel having multiple unit light-collecting lenses configured on a lens panel, which is arranged near light emission parts of the light-emitting elements, and positioned to correspond to the unit light-emitting elements, respectively, in a matrix-type array structure such that, with regard to a main optical axis, the unit light-collecting lenses are eccentric toward a predetermined reference center axis that extends through the center of the ultraviolet light-emitting element array, wherein each unit light-collecting lens has a light incident surface formed in the shape of one selected from a flat surface, a concave surface having a curvature (R) of (-) 0.15 or less, and a convex surface having a curvature (R) of (+) 0.15 or less, and has a light emission surface formed as a convex lens, and the distance (C1) of spacing between the ultraviolet light-emitting elements and the unit light-collecting lenses is arranged to satisfy, with regard to the diameter (d) of the light-collecting lenses, the value of 0.15<C1/d<0.5. The above configuration is advantageous in that diffused light emitted from each unit ultraviolet light-emitting element is effectively collected in the light-receiving area of the exposure device, making it possible to maximize the amount of light with lower power consumption; particularly, ultraviolet light having a single short wavelength and having high efficiency and high output is implemented, thereby securing an exposure performance that can make the exposure pattern smaller and can substantially improve the resolution; and the light source of an existing exposure device can be replaced in a practical and economical manner.
(FR) La présente invention concerne une unité de module de source de lumière pour exposition. L'unité de module de source de lumière pour exposition selon la présente invention comprend : un panneau de source de lumière ayant de multiples éléments électroluminescents ultraviolets configurés dans une structure de réseau ; et un panneau optique ayant de multiples lentilles de collecte de lumière d'unité configurées sur un panneau de lentille, qui est placé à proximité des parties électroluminescentes des éléments électroluminescents, et positionné pour correspondre aux éléments électroluminescents d'unité, respectivement, dans une structure de réseau de type matrice de telle sorte que, par rapport à un axe optique principal, les lentilles de collecte de lumière d'unité sont excentriques vers un axe central de référence prédéterminé qui s'étend à travers le centre du réseau d'éléments électroluminescents ultraviolets, chaque lentille de collecte de lumière d'unité ayant une surface d'incidence de lumière sous la forme de l'une parmi une surface plate, une surface concave ayant une courbure (R) de (-) 0,15 ou moins, et une surface convexe ayant une courbure (R) de (+) 0,15 ou moins, et ayant une surface électroluminescente sous la forme d'une lentille convexe, et la distance (C1) d'espacement entre les éléments électroluminescents ultraviolets et les lentilles de collecte de lumière d'unité est conçue pour satisfaire, par rapport au diamètre (d) des lentilles de collecte de lumière, la valeur de 0,15 < C1/d < 0,5. Ladite configuration est avantageuse en ce que la lumière diffusée émise par chaque élément électroluminescent ultraviolet d'unité est collectée efficacement dans la zone de réception de lumière du dispositif d'exposition, permettant de maximiser la quantité de lumière avec une faible consommation d'énergie ; en particulier, la lumière ultraviolette ayant une longueur d'onde courte unique et ayant une efficacité élevée et un rendement élevé est mise en œuvre, ce qui permet de garantir une performance d'exposition qui peut rendre le motif d'exposition plus petit et peut sensiblement améliorer la résolution ; et la source de lumière d'un dispositif d'exposition existant peut être remplacée de manière pratique et économique.
(KO) 본 발명은 노광용 광원모듈 유닛을 개시한다. 본 발명에 의한 노광용 광원모듈 유닛은, 다수의 자외선 발광 소자가 어레이 구조로 이루어진 광원 패널과, 발광 소자의 광출사측에 배치되는 렌즈 패널에 다수의 단위 집광 렌즈가 단위 발광 소자에 각각 대응되는 위치에서 주광축에 대해 자외선 발광소자 어레이의 중심을 지나는 임의의 기준 중심축선 측으로 편심된 상태의 매트릭스 형태의 어레이 구조로 이루어진 광학 패널을 포함하며, 단위 집광 렌즈는 광 입사면이 평면과, (-)0.15 이내의 곡률(R)을 가지는 오목면 및 (+)0.15 이내의 곡률(R)을 가지는 볼록면 중에서 선택된 어느 하나의 형태로 형성되는 동시에 광 출사면은 볼록 렌즈로 형성되고, 외선 발광 소자와 단위 집광 렌즈의 이격 거리(C1))는 집광 렌즈의 직경(d)에 대하여 0.15<C1/d<0.5의 값을 만족하도록 배열되는 구성을 가진다. 이러한 구성에 따르면, 각 단위 자외선 발광소자로부터 조사되는 확산 광이 노광장치의 수광 영역에 유효하게 집광되어 저소비전력에 의한 광량의 극대화를 도모할 수 있고 특히, 고효율, 고출력의 단일파장, 단파장의 자외선광을 구현함으로서 노광패턴의 미세화와 해상도를 획기적으로 향상시킬 수 있는 노광 성능을 확보할 수 있는 동시에 기존 노광장치의 광원을 실용적이고 경제적으로 대체할 수 있는 효과를 제공할 수 있다.
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African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)
Also published as:
CN108780281