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1. (WO2017133136) MANUFACTURING METHOD FOR COLOR FILTER SUBSTRATE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/133136 International Application No.: PCT/CN2016/082671
Publication Date: 10.08.2017 International Filing Date: 19.05.2016
IPC:
G02F 1/1335 (2006.01) ,G02F 1/1339 (2006.01)
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
133
Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333
Constructional arrangements
1335
Structural association of optical devices, e.g. polarisers, reflectors, with the cell
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
133
Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333
Constructional arrangements
1339
Gaskets; Spacers; Sealing of the cell
Applicants:
武汉华星光电技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖开发区高新大道666号生物城C5栋 Building C5, Biolake of Optics Valley, No.666 Gaoxin Avenue, Wuhan East Lake High-tech Development Zone Wuhan, Hubei 430070, CN
Inventors:
李安石 LI, Anshi; CN
Agent:
深圳市德力知识产权代理事务所 COMIPS INTELLECTUAL PROPERTY OFFICE; 中国广东省深圳市 福田区上步中路深勘大厦15E Room 15E Shenkan Building, Shangbu Zhong Road, Futian District Shenzhen, Guangdong 518028, CN
Priority Data:
201610071592.501.02.2016CN
Title (EN) MANUFACTURING METHOD FOR COLOR FILTER SUBSTRATE
(FR) PROCÉDÉ DE FABRICATION DE SUBSTRAT DE FILTRE COLORÉ
(ZH) 彩膜基板的制作方法
Abstract:
(EN) Disclosed is a manufacturing method for a color filter substrate, comprising: forming a photoresist layer (50) made of a negative photoresist material on a color filter film layer (30), performing back exposure on the photoresist layer (50) from below a base substrate (10), curing a portion, at the base substrate (10) side, of the photoresist layer (50) to form a planarization layer (51), then performing front exposure on the photoresist layer (50) from above the base substrate (10) by using a photomask (80) to form a spacer (52), finally developing the photoresist layer (50), which has been subjected to exposure twice, and removing an uncured portion on the photoresist layer (50), thereby simultaneously obtaining the planarization layer (51) and the spacer (52) located on the planarization layer (51). Compared to existing manufacturing methods for color filter substrates, the process flow is greatly simplified, reducing equipment investment for a production line as well as production costs, manufacturing process risks, and product production cycles.
(FR) La présente invention concerne un procédé de fabrication d'un substrat de filtre coloré, comprenant : la formation d'une couche de résine photosensible (50) constituée d'un matériau de résine photosensible négatif sur une couche de film de filtre coloré (30), la conduite d'une exposition arrière sur la couche de résine photosensible (50) depuis le dessous d'un substrat de base (10), le durcissement d'une partie, au niveau du côté de substrat de base (10), de la couche de résine photosensible (50) pour former une couche de planarisation (51), puis la conduite d'une exposition avant sur la couche de résine photosensible (50) depuis le dessus du substrat de base (10) au moyen d'un photomasque (80) pour former un élément d'espacement (52), et finalement le développement de la couche de résine photosensible (50), qui a été soumise à une exposition deux fois, le retrait d'une partie non durcie sur la couche de résine photosensible (50), de manière à obtenir simultanément la couche de planarisation (51) et l'élément d'espacement (52) situé sur la couche de planarisation (51). Par rapport aux procédés de fabrication existants pour des substrats de filtre coloré, le flux de production est grandement simplifié, de manière à réduire l'investissement en équipement pour une ligne de production, ainsi que les coûts de production, les risques liés au procédé de fabrication, et les cycles de production de production.
(ZH) 一种彩膜基板的制作方法,先在彩色滤光膜层(30)上形成一层负型光刻胶材料的光刻胶层(50),然后从衬底基板(10)的下方对所述光刻胶层(50)进行背面曝光,使光刻胶层(50)靠近衬底基板(10)侧的部分固化,用于形成平坦化层(51),接着利用光罩(80)从衬底基板(10)的上方对光刻胶层(50)进行正面曝光,用于形成隔垫物(52),最后通过对经过两次曝光的光刻胶层(50)进行显影,将光刻胶层(50)上未固化的部分去除掉,进而同时得到平坦化层(51)、及位于平坦化层(51)上的隔垫物(52),与现有的彩膜基板的制作方法相比,工艺流程大大简化,从而减少了生产线上的设备投入,降低了产品的生产成本及制程中出现问题的风险,缩短了产品的生产周期。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)
Also published as:
US20180067358