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1. (WO2017131183) MULTILAYER TRANSPARENT CONDUCTIVE FILM, MULTILAYER WIRING FILM AND METHOD FOR PRODUCING MULTILAYER WIRING FILM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/131183 International Application No.: PCT/JP2017/002998
Publication Date: 03.08.2017 International Filing Date: 27.01.2017
IPC:
H01B 5/14 (2006.01) ,C23C 14/06 (2006.01) ,B32B 7/02 (2006.01) ,C23C 14/08 (2006.01) ,G02F 1/1343 (2006.01) ,G06F 3/041 (2006.01) ,H01B 13/00 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
5
Non-insulated conductors or conductive bodies characterised by their form
14
comprising conductive layers or films on insulating-supports
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
B PERFORMING OPERATIONS; TRANSPORTING
32
LAYERED PRODUCTS
B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
7
Layered products characterised by the relation between layers, i.e. products essentially comprising layers having different physical properties or products characterised by the interconnection of layers
02
in respect of physical properties, e.g. hardness
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
133
Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333
Constructional arrangements
1343
Electrodes
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
F
ELECTRIC DIGITAL DATA PROCESSING
3
Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
01
Input arrangements or combined input and output arrangements for interaction between user and computer
03
Arrangements for converting the position or the displacement of a member into a coded form
041
Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
B
CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
13
Apparatus or processes specially adapted for manufacturing conductors or cables
Applicants:
三菱マテリアル株式会社 MITSUBISHI MATERIALS CORPORATION [JP/JP]; 東京都千代田区大手町一丁目3番2号 3-2, Otemachi 1-chome, Chiyoda-ku, Tokyo 1008117, JP
Inventors:
中澤 弘実 NAKAZAWA Hiromi; JP
石井 博 ISHII Hiroshi; JP
歳森 悠人 TOSHIMORI Yuto; JP
齋藤 淳 SAITO Atsushi; JP
Agent:
志賀 正武 SHIGA Masatake; JP
寺本 光生 TERAMOTO Mitsuo; JP
松沼 泰史 MATSUNUMA Yasushi; JP
細川 文広 HOSOKAWA Fumihiro; JP
大浪 一徳 ONAMI Kazunori; JP
Priority Data:
2016-01470328.01.2016JP
2017-00334912.01.2017JP
Title (EN) MULTILAYER TRANSPARENT CONDUCTIVE FILM, MULTILAYER WIRING FILM AND METHOD FOR PRODUCING MULTILAYER WIRING FILM
(FR) FILM CONDUCTEUR TRANSPARENT MULTICOUCHE, FILM DE CÂBLAGE MULTICOUCHE ET PROCÉDÉ DE FABRICATION DE FILM DE CÂBLAGE MULTICOUCHE
(JA) 積層透明導電膜、積層配線膜及び積層配線膜の製造方法
Abstract:
(EN) This multilayer transparent conductive film is characterized by comprising an Ag film (12) that is formed from Ag or an Ag alloy and transparent conductive oxide films (11, 13) that are arranged on both surfaces of the Ag film (12), and is also characterized in that the transparent conductive oxide films (11, 13) are formed from an oxide containing Zn, Ga, Y and Sn. It is preferable for this multilayer transparent conductive film to have an average transmittance of 85% or more for the visible light wavelength range of 400-800 nm and a sheet resistance of 10 Ω/sq. or less.
(FR) L'invention porte sur un film conducteur transparent multicouche qui est caractérisé en ce qu'il comprend un film d'Ag (12) qui est constitué d'Ag ou d'un alliage d'Ag et des films d'oxyde conducteur transparent (11, 13) qui sont disposés sur les deux faces du film d'Ag (12), et est également caractérisé en ce que les films d'oxyde conducteur transparent (11, 13) sont constitués d'un oxyde contenant Zn, Ga, Y et Sn. Il est préférable que ce film conducteur transparent multicouche présente une transmittance moyenne supérieure ou égale à 85 % pour la plage de longueurs d'onde de lumière visible allant de 400 à 800 nm et une résistance de couche inférieure ou égale à 10 ohms par carré.
(JA) AgまたはAg合金よりなるAg膜(12)と、Ag膜(12)の両面に配置された透明導電酸化物膜(11、13)と、を有し、透明導電酸化物膜(11、13)は、Zn、Ga、Y及びSnを含む酸化物からなることを特徴とする。波長400~800nmの可視光域の平均透過率が85%以上、シート抵抗値が10Ω/sq.以下であることが好ましい。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)