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1. (WO2017131148) SUBSTRATE TRANSFER HAND
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2017/131148 International Application No.: PCT/JP2017/002909
Publication Date: 03.08.2017 International Filing Date: 27.01.2017
IPC:
H01L 21/677 (2006.01) ,B25J 15/00 (2006.01) ,B65G 49/06 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15
Gripping heads
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
06
for fragile sheets, e.g. glass
Applicants:
株式会社ダイヘン DAIHEN CORPORATION [JP/JP]; 大阪府大阪市淀川区田川2丁目1番11号 2-1-11, Tagawa, Yodogawa-ku, Osaka-shi, Osaka 5328512, JP
Inventors:
岡本 健太郎 OKAMOTO Kentaro; JP
Agent:
吉田 稔 YOSHIDA Minoru; JP
臼井 尚 USUI Takashi; JP
土居 史明 DOI Fumiaki; JP
鈴木 伸太郎 SUZUKI Shintaro; JP
Priority Data:
2016-01547629.01.2016JP
Title (EN) SUBSTRATE TRANSFER HAND
(FR) MAIN POUR TRANSFERT DE SUBSTRAT
(JA) 基板移載用ハンド
Abstract:
(EN) [Problem] To provide a substrate-transfer hand capable of reducing the number of points where contact is made with a substrate, and supporting the substrate in a high-rigidity state. [Solution] The present invention includes a vertical hand support 20a extending in the vertical direction, and a plurality of horizontal hand supports 31a, 32a connected to the vertical hand support 20a and extending in the direction intersecting the direction in which the vertical hand support 20a extends. The plurality of horizontal hand supports 31a, 32a include a plurality of first horizontal supports 31a and a plurality of second horizontal hand supports 32a. Each of the first horizontal hand supports 31a has a plurality of first contacts 40A that can contact the substrate SB, said contacts 40A being aligned in the direction in which the first horizontal supports 31a extend, and the maximum height position of the first contact points 40A is a first height. Each of the second horizontal hand support parts 32a respectively has a plurality of second contacts 40B that can contact the substrate SB, said second contacts 40B being aligned in the direction in which the second horizontal hand supports 32a extend, and the maximum height of the second contact points 40B is a second height that is lower than the first height.
(FR) L’invention fournit une main pour transfert de substrat réduisant les points de contact sur un substrat, et permettant de supporter ce substrat dans un état de rigidité élevée. L’objet de l’invention contient : une partie support (20a) de main longitudinale se prolongeant dans la direction longitudinale ; et une pluralité de parties (31a, 32a) support de main latérales raccordée à la partie support de main longitudinale, et se prolongeant dans une direction sécante à la direction de prolongement de la partie support (20a) de main longitudinale. Ladite pluralité de parties (31a, 32a) support de main latérales inclut une pluralité de premières parties (31a) support de main latérales et une pluralité de secondes parties (32a) support de main latérales. Chacune desdites premières parties (31a) support de main latérales possède une pluralité de premiers points de contact (40A) rangée individuellement dans la direction de prolongement de la première partie (31a) support de main latérale en question, et permettant un contact avec ledit substrat (SB). La position la plus haute de ces premiers points de contact (40A), constitue une première hauteur. Chacune desdites secondes parties (32a) support de main latérales possède une pluralité de seconds points de contact (40B) rangée individuellement dans la direction de prolongement de la seconde partie (32a) support de main latérale en question, et permettant un contact avec ledit substrat (SB). La position la plus haute de ces seconds points de contact (40A), constitue une seconde hauteur plus basse que ladite première hauteur.
(JA) 【課題】基板に対する接点を減らし、かつ、基板を剛性の高い状態で支持することができる基板移載用ハンドを提供する。 【解決手段】縦方向に延びる縦ハンド支持部20aと、当該縦ハンド支持部20aに連結され、当該縦ハンド支持部20aが延びる方向に対して交差する方向に延びる複数の横ハンド支持部31a,32aと、を含み、前記複数の横ハンド支持部31a,32aは、複数の第1横ハンド支持部31aと、複数の第2横ハンド支持部32aとを含んでおり、前記各第1横ハンド支持部31aは、それぞれ、当該第1横ハンド支持部31aの延びる方向に並び、前記基板SBに接することができる複数の第1接点40Aを有し、当該第1接点40Aの最高高さ位置は、第1の高さであり、前記各第2横ハンド支持部32aは、それぞれ、当該第2横ハンド支持部32aの延びる方向に並び、前記基板SBに接することができる複数の第2接点40Bを有し、当該第2接点40Bの最高高さ位置は、前記第1の高さよりも低い第2の高さである。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
CN108604564KR1020180108685US20190035670